EV 2.0 Series

Endpoint & Chamber Health Monitor

The EV 2.0 Series is a versatile, high-performance optical endpoint and chamber health monitor designed for semiconductor dry-etch, CVD, and cleaning processes. Utilizing configurable Optical Emission Spectroscopy (OES) and/or Multi-Wavelength Interferometry (INT), it delivers real-time in-situ process endpoint detection, chamber condition monitoring, and recipe-driven quality control within single or cluster tool environments.

EV 2.0 Series

Endpoint & Chamber Health Monitor

Why Choose EV 2.0 Series

Modular & Configurable – Supports multiple spectrometer options and software kits for tailored OES or interferometry solutions.
Real-Time Detection – Includes an intuitive recipe editor and visualization tools to monitor plasma emissions, leaks, arcing, or endpoint timing in real time.
Smart Data Management – Embedded SQL-based chamber and tool databases enable seamless run-to-run, lot-to-lot, and chamber-to-chamber tracking.
Scalable Deployment – Configures easily from single-chamber to multi-chamber cluster tools, reducing development effort and optimizing monitoring coverage.

Key Advantages of EV 2.0 Series

Adaptive Configuration Options

OES & INT Modes

Enables flexible matching to diverse process needs using spectroscopy or interferometry monitoring.

Immediate Process Insights

Live Endpoint Detection

Recipe-driven monitoring identifies endpoints and anomalies as they occur, enhancing process reliability.

Built-in Traceability

Chamber-Level Database

Keeps all process data—recipes, runs, and chamber history—centralized for quality control and analytics.

Cluster-Ready Design

Single to Multi-Chamber

Expandable and modular layout supports both stand-alone and cluster tool integration.

Technical Specifications of EV 2.0 Series

EV 2.0 Spectrometer

System outline

The small sized spectrometer is based on a concave holographic grating (aberration corrected) with 20mm focal length (LR) or 75 mm focal length (STD, HR) or 99 mm focal length (HTR) and 50/25 µm slit depending on model. The spectrometer is attached to a window of the Tool chamber or through SMA fiber.
4 models of spectrometers:

LR: Low resolution
STD: Standard resolution
HR: High resolution
HTR: High resolution and High throughput
Other on requests

Grating

HORIBA Aberration corrected Concave grating

Detector

BT CCD
Maker: Hamamatsu Photonics

Electronics

BT CCD Electronics
Maker: HORIBA, Ltd.
Model: JY70
16bit acquisition electronic
Exposure time: 1 ms ～ 10 sec

The following ports are installed
1. LAN Ethernet 100Mbps RJ45 (TCP/IP)
2. IOR 70 Remote Db25 PIO-RS
3. DC Power supply: 9 to 24V, Standard 24V

Spectrometer LR

Model: EV2.0 LR (Low Resolution)

Wavelengths range 300 nm～ 900 nm
Focal length: 20 mm
Resolution: 6.5 nm
Size (mm): 76 W X 128 D X 134 H
Weight (kg): 0.65 kg without cover (cover: + 0,15kg)

Spectrometer STD

Model: EV2.0 STD (Standard Resolution)

Wavelengths range 200 nm～ 1050 nm
Focal length: 75 mm
Resolution 2.5 nm
Size (mm): 111 W X 128 D X 134 H
Weight (kg): 1 kg without cover (cover: + 0,15kg)

Example of spectrum measured with EV 2.0 standard spectrometer

Spectrometer HR

Model: EV2.0 HR (High Resolution)

Wavelengths range 300 nm～ 800 nm
Focal length: 75 mm, Czerny-Turner
Resolution: down to 1.0 nm
Size (mm): 111 W X 128 D X 134 H
Weight (kg): 0.8 kg without cover (cover: + 0,15kg)

Spectrometer HTR

Model: EV2.0 HTR (High Resolution and High Throughput)

Wavelengths range 190 nm ～ 900 nm
Focal length: 99 mm
Resolution: 1.0 nm
Size (mm): 147 W X 176 D X 134 H
Weight (kg): 2.8 kg without cover (cover: + 0,2 kg)

Remote

EV 2.0 may be connected to any host through digital Link with RJ 45 connector: TCP/IP.
EV 2.0 Endpoint and Chamber Health Monitor

EV 2.0 spectrometer contains an interface board to provide galvanic isolation between the host controller hardware of the HOST / Tool from the spectrometer main electronics.

Label on	Description	Plug type
Remote	PIO, RS, analog 0-5V	Female DB25

scrollable

This permits to communicate by logic wiring, fast, deterministic with full optocouplers and power spikes isolation, frequently found in industrial fab environment

Certification

Integration

3U integration or stand alone with HORIBA Blue cover

scrollable

Windows 10 PRO, 64bits PC Controller

DC Power Supply	24V
SSD	256 Go, 2,5” SATAIII
Design	Aluminum Frame, fanless design Anti-vibration and shock resistant
Connection	RS-232/422/485 RS-232 USB 3.0 on Standard 2x RJ45 Gb VGA, HDMI …

scrollable

Standard PC (Default)
CPU	64bits, Intel® Pentium® N4200, 2.5 GHz
RAM	4Go DDR3
Controller Dimensions	197 (W) x 110 (D) x 55 (H) mm
Controller Mass	2 kg

scrollable

High Grade PC (Optional)
CPU	64bits, Intel® Core™ i7-7700T 2,9 GHz
RAM	8Go DDR4 2133MHz
Controller Dimensions	264 (W) x 96.4 (D) x 186.2 (H) mm
Controller Mass	4.5 kg

scrollable

Option

Accessories for Optical Emission Spectroscopy (Chamber side window)	ADAPTATION 1: DIN75 Flange Adaptor ADAPTATION 2: UV, SMA fiber, 2m default ADAPTATION 3: KF40 Optical condenser
Accessories for Interferometry (Chamber top window)	ADAPTATION 1: KF25 Tilt optical condenser ADAPTATION 2: UV, Y SMA fiber, 2m default ADAPTATION 3: Flash Lamp
Accessories for Spectrometer and PC	Direct connection on tool 24 VDC <1A, 20W for spectrometer <4A, 80W for PC External power supply AC 100-240V->24VDC, 5A HDMI Screen, Mouse, keyboard
Software	3 choices of software EV 2.0 PC: Sigma_P, RD 2.0 for Engineering & Production EV 2.0 SMART: autonomous for Mass Production EV 2.0 API: SDK for integrators
Various Configurations	OES or Interferometry EV 2.0 for Single chamber integration EV 2000/2006 for cluster tool integration up to 6 chambers EV 2.0 + LEM camera for dual-sensor monitoring on one chamber

scrollable

Environmental

Operating Temp/humidity	Temp：5℃～45℃ Humidity：0～70％RH　（No dew condensation）
Transportation Temp/humidity	Temp：5℃～55℃ Humidity：0～70％RH　（No dew condensation）