IR-300

Vapor Concentration Monitor

The IR‑300 Vapor Concentration Monitor provides real‑time inline measurement of precursor concentration in Metal‑Organic Chemical Vapor Deposition (MOCVD) processes, enabling precise control of LED, optical device, and semiconductor component fabrication. Its fast response and excellent repeatability help optimize process parameters, improve yield, ensure reproducibility, extend MTTA, and reduce unplanned interventions and material waste.

IR-300

Vapor Concentration Monitor

Why Choose IR-300

Optimise process control for higher‑grade device production
Improve device yield and reduce scrap; Enhance reproducibility
Predictive maintenance with bubbler exchange alerts
Extend MTTA
Reduce unplanned interventions and precursor waste

Key Advantages of IR-300

Fast Response

1.5 s response time

Enables real‑time inline concentration tracking

Excellent Repeatability

Double‑beam NDIR detection

Ensures stable measurements over extended runs

Multi‑Calibration Capability

Supports up to 3

chemicals or concentration ranges

Compact Orientation

124 mm face‑to‑face footprint

Simplifies integration in existing process lines

Applications of IR-300

LED wafer fabrication

Real‑time precursor monitoring for precise epitaxial growth

Optical device production

Inline concentration feedback to enhance uniformity

Semiconductor materials R&D

Multi‑chemical calibration for novel precursor development

High‑volume MOCVD production

Continuous monitoring to reduce scrap and improve yield

Predictive maintenance

Bubbler exchange alerts to extend equipment uptime; Quality assurance — Inline verification of vapor concentration in semiconductor fabs

Technical Specifications of IR-300

Specifications (Last updated in August, 2022)

*1 Please contact HORIBA STEC regarding chemical and/or full-scale concentration other than those shown above.

*2 The specification is guaranteed under the standard conditions of HORIBA STEC.

Ambient temperature: 23±2°C, Gas cell temperature: 60°C, Measurement flow rate: 1000 SCCM, Calibration gas: C3H8 balanced in N2 at 105 kPa(A)

*3 Accuracy is based on concentration of the calibration gas.

*4 Gas replacement time (Td: time delay) is not included in the response.

The typical Td in our inspection equipment is approx. 1.0 second.

The response without moving average is approx. 1.5 second. It is necessary to change # of moving average of firmware settings by digital communication.

*5 Recommended operating condition. The performance is guaranteed on the standard condition.

*6 Required specification of temperature controller:

Control cycle: 1 second or less, PID control with auto tuning function

*7 Optional wetted material: Body: SUS 316L, Gas cell optical window: Sapphire, Ni, Al

*8 The height of IR-315 is 145mm