MFC - S600 Series
Digital Mass Flow Controller
The S600 Series is designed by HORIBA STEC and manufactured by HORIBA Precision Instruments to emphasize its cost reduction capabilities in your process. The S600 Series is suitable for a large variety of industries and applications. The S600 Series can control a wide range of flows: from 3 SCCM to 500 SLM and has various types of communications available i.e. Analog, RS485, DeviceNet™, PROFIBUS™, and EtherCAT®. The S600 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response.
Why Choose MFC - S600 Series
- Wide flow range: 3 SCCM–500 SLM
- Multi‑protocol connectivity: Analog, RS485,Modbus, Profinet PROFIBUS™, DeviceNet™, EtherCAT®
- High accuracy: ±1.0 % S.P.
- Fast response: 1.5 s
- Broad industry compatibility
Key Advantages of MFC - S600 Series
1.
Wide Flow Range
Accommodates micro to large‑scale flows
2.
Reliable local support
Production, calibration, all service support available in India factory.
3.
High Precision
Delivers reliable, stable mass flow
4.
Rapid Response
Minimizes process lag and enhances dynamic control
Applications of MFC - S600 Series
Photovoltaic Manufacturing
Precise gas flow control for solar cell manufacturing
Lab Grown Diamond
Reliable flow control for high quality diamond growth
Vacuum Coating
Suitable variety types of deposition processes.
Research Laboratories
Flexible flow control for experimental setups
Environment Measurement
Reference value of PM2.5 measurement
Burner gas
Gas mixture for flare control
Technical Specifications of MFC - S600 Series
| Parameter | Specification |
|---|---|
| Product Series | S600 Series Digital Mass Flow Controller |
| Product Type | Mass Flow Controller (MFC) Mass Flow Meter variant: S600M |
| Communication Options | Analog / RS485 (F-Net Protocol) / PROFIBUS DP-V0 / DeviceNet / EtherCAT |
| Full Scale Flow Range (N₂) | 10 SCCM to 500 SLM |
| Flow Control Range | 2% to 100% of full scale |
| Response Time | ≤ 1.5 sec F.S. (typical ≤ 1.0 sec) For 300–500 SLM models: ≤ 2.0 sec F.S. |
| Accuracy |
For 10 SCCM to 200 SLM: ±1.0% S.P. (above 30% F.S.), ±0.3% F.S. (up to 30% F.S.) For 300 SLM to 500 SLM: ±1.5% S.P. (above 30% F.S.), ±0.45% F.S. (up to 30% F.S.) |
| Linearity | ±0.5% F.S. |
| Repeatability | ±0.2% F.S. |
| Flow Rate Setting Signal | 0.1 to 5 VDC (2% to 100% F.S.) |
| Flow Rate Output Signal | 0 to 5 VDC (0% to 100% F.S.) |
| Power Supply Options | ±15 VDC or 24 VDC depending on model / communication type |
| Power Consumption |
RS485 / PROFIBUS / EtherCAT standard models: approx. 6–6.9 VA Higher flow models (300–500 SLM): up to 10 VA |
| Operating Differential Pressure | 50 to 300 kPa (D), depending on model and flow range |
| Max. Operating Pressure | 300 kPa (G) or 450 kPa (G), depending on model |
| Pressure Resistance | 1 MPa (G) |
| Operating Temperature | 5°C to 45°C (recommended: 15°C to 35°C) |
| External Leak Rate |
Rubber seal models: 1 × 10-11 Pa·m³/s (He) or less Metal seal / larger flow variants: up to 1 × 10-10 or 1 × 10-8 Pa·m³/s (He), depending on model |
| Wetted Materials |
Metal seal models: SUS316L, PTFE, magnetic stainless steel Rubber seal models: SUS316L, PTFE, magnetic stainless steel, fluoro rubber |
| Seal Options | Rubber / Metal |
| Fitting Options |
1/4 inch Swagelok 1/4 inch VCR 3/8 inch Swagelok 1/2 inch VCR |
| Connector Options |
D-sub 9 pin male M8 connector (EtherCAT) M12 connector (DeviceNet) |
| Available Gases | N₂, O₂, NH₃ and others depending on calibration / configuration |
| Design / Manufacturing | Designed with HORIBA STEC (Japan) technology and manufactured by HORIBA Precision Instruments (China) |
| Key Features | High accuracy, fast response, multiple communication options, core parts made in Japan |
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