The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes film thickness from a few Angstroms to 20 µm, optical constants (n,k), and structural properties such as roughness, graded layers, and anisotropic films within seconds.

Smart SE

High‑precision thickness and n,k measurement

Microelectronics thin film metrology

Anti‑reflective and passivation layer analysis

Photovoltaic coating development

Flat panel display coating evaluation

Assessment of roughness and graded structures

Surface treatment optimization

Characterization of OLED and sensor films

Organic electronics R&D

Automated measurements on process chambers 

In‑situ process monitoring

HORIBA Scientific offers 200 years of experience in developing high-performance scientific instruments and analytical solutions.

Scientific

The Partica LA-960V2 is a high-performance laser diffraction particle size analyzer, offering exceptional accuracy, rapid measurements, and unmatched repeatability. It supports both wet and dry measurement modes with advanced dispersion systems, delivering reliable and reproducible results for particle sizes ranging from nanometers to millimeters.

Partica LA-960V2

Model

Mie scattering and Fraunhofer diffraction

Measurement principles

Measurement range

Typical measurement takes 60 seconds from liquid filling, sampling and measurement to rinsing

Measurement Time

Analysis Materials

Particle size and size distribution, size related theoretical calculated values

Measurement Output

Circulation measurement or fraction cell measurement (Fraction cell is optional)

Measurement Method

Approximately 10 mg - 5 g (Depending on the particle size, distribution and density)

Sample Quantity

Approximately 180 mL for standard pumping system, 5/10/15 mL for Fraction Cell accessory, Manual filling : 35 mL, Automatic filling : 40 mL for MiniFlow accessory. Approximately 1 L of LiterFlow option.

Dispersing Volume

A type: Water*, S type: Common organic solvents (*also, mixtures with small volumes of ethanol)

Compatible Liquids

USB 2.0 (USB 3.0 required for some options)

Communication

Red solid state 5 mW laser diode (650 nm), Blue solid state 3 mW LED (405 nm)

Light Sources

In-line ultrasonic probe: 30 W, 20 kHz, adjustable levels Circulation pump: Fully automated ﬁll and circulation pumps, 15 adjustable speeds, 4 selectable fill levels, 15 selectable circulation speeds (max: 10 L/min)

Dispersion System

15〜35°C (59 to 95°F), relative humidity 85% or less (no condensation)

Operating Conditions

Power

Dimensions

Mass

Windows PC with available USB ports, Windows 10 64-bit or Windows 11 64-bit. Contact for additional details.

Computer Requirements

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Confocal Raman Microscope with advanced automation and imaging features.

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EMIA-Expert

Carbon/Sulfur Analyzer
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DeltaFlex

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Duetta

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EMGA‑Pro (EMGA‑20P)

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EMGA‑Expert 30E

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FluoroMax Plus

Steady State and Lifetime Spectrofluorometer

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Ultima Expert LT

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nanoPartica SZ-100V2 Series

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Partica mini LA-350

Laser Diffraction Particle Size Distribution Analyzer

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LabRAM Soleil Nano

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MacroRAM

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MESA-50

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Nanolog

The NEW SA-9650 series of surface area analyzers provides convenience, remarkable measurement speed, and very low cost-per-analysis for diverse materials. Using time-proven dynamic flowing gas BET methodology and push-button automation, it delivers fast single-point (15 min) or multi-point (45 min) measurements. Redesigned cabinet offers safe, front-access prep and test stations with built-in PC control and enhanced intuitive software for method files, data export, and PDF reporting.

SA-9650 Series

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SA-9600 Series

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SLFA-6000

X-ray Fluorescence Sulfur-in-Oil Analyzer

SLFA-6000 

The UVISEL Plus is a modular phase-modulated spectroscopic ellipsometer covering 190–2100 nm with FastAcq double modulation technology, enabling high-resolution, high-accuracy thin film and interface characterization in under&nbsp;3 minutes. Its&nbsp;50 kHz phase modulation and advanced optics deliver excellent signal-to-noise without mechanical movement, supporting measurement of films from 1 Å to&nbsp;50 μm, including backside reflections, and offering benchtop or in-situ integration via DeltaPsi2 or Auto‑Soft software.

UVISEL Plus

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EMIA‑Pro(ms)

EMIA‑Pro

The HORIBA Fluorolog‑QM™ series is a fourth‑generation, modular research‑grade spectrofluorometer combining all‑reflective optics with a choice of light sources, detectors, and sample accessories for unparalleled sensitivity and versatility. Its modular design allows users to add or upgrade components—such as pulsed lasers, LEDs, and NIR detectors—at any time to meet evolving experimental needs, supported by new steady‑state and lifetime software for streamlined workflows.

Fluorolog-QM

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GD-Profiler 2™

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XploRA™ PLUS

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XGT-9000

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XploRA Nano

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DeltaPro

The iHR Series includes the 320 mm and 550 mm focal length imaging spectrometers, recognized worldwide for their iconic, uniquely shaped designs and unmatched optical performance. Engineered for versatility, these spectrometers offer multiple entrance/exit ports, automated grating and slit control, and high throughput across a broad spectral range—making them ideal for research, OEM customization, and demanding imaging applications.

iHR Series

The LabRAM Odyssey is a fully automated confocal Raman microscope engineered for ultra-high spectral and spatial resolution across 2D and 3D imaging. With an expansive wavelength capability from deep UV to NIR, advanced confocal optics, and effortless automation, it caters to sophisticated applications such as biomolecular research, materials characterization, and semiconductors.

LabRAM Odyssey

Confocal Raman & High-Resolution Spectrometer

Standard Configurations
Spectra range:	450nm to 1000nm
Spectra resolution	Better than 3nm
Light source	Combined Halogen and Blue LED
Measurement time	<1sec to 10 sec
Beam size	75µm * 150µm, 100µm * 250µm, 100µm * 500µm, 150µm * 150µm, 250µm * 250µm, 250µm * 500µm, 500µm*500µm
Angle of incidence	450 to 900 by step of 50
Sample size	Up to 200mm
Sample alignment	Manual 17mm height adjustement and tilt
Dimensions	100cm * 46cm * 23cm(WHD)

Performances
Straight-through air accuracy	Ψ=450±0.050 Δ=00±0.20
Thickness accuracy on 1000 Å Oxide	0.04%
Thickness repeatability on 1000 Å Oxide	±0.02%

Smart SE

Smart SE

Why Choose Smart SE

Applications of Smart SE

Microelectronics thin film metrology

Photovoltaic coating development

Flat panel display coating evaluation

Surface treatment optimization

Organic electronics R&D

In‑situ process monitoring

Technical Specifications of Smart SE

Related Products

Partica LA-960V2

LabRAM Soleil

EMIA-Expert

DeltaFlex

Duetta

EMGA‑Pro (EMGA‑20P)

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