UVISEL Plus

Spectroscopic Ellipsometer

The UVISEL Plus is a modular phase-modulated spectroscopic ellipsometer covering 190–2100 nm with FastAcq double modulation technology, enabling high-resolution, high-accuracy thin film and interface characterization in under 3 minutes. Its 50 kHz phase modulation and advanced optics deliver excellent signal-to-noise without mechanical movement, supporting measurement of films from 1 Å to 50 μm, including backside reflections, and offering benchtop or in-situ integration via DeltaPsi2 or Auto‑Soft software.

UVISEL Plus

Spectroscopic Ellipsometer

Why Choose UVISEL Plus

Full spectral coverage — 190–2100 nm phase modulation — Enables full-range film analysis
FastAcq double modulation — Complete scan in <3 minutes — Accelerates measurements
Phase modulation — 50 kHz without moving parts — Delivers high accuracy & SNR
Modular design — Microspots, variable angle & mapping stage — Scales to application needs
Software control — DeltaPsi2 & Auto‑Soft — Streamlines modelling & operations

Key Advantages of UVISEL Plus

Fast Acquisition

<3 minutes (190–2100 nm)

Speeds thin film measurements

Superior SNR

Excellent signal-to-noise ratio

Ensures data reliability

Broad Film Range

1 Å to 50 μm thickness

Measures ultra-thin to thick layers

Integration Flexibility

Benchtop & in-situ compatibility

Adaptable to lab and process environments

Applications of UVISEL Plus

Nanomaterial

Characterization of engineered nano materials by spectroscopic ellipsometry.

Photovoltaic

Characterization of Photovoltaic devices by spectroscopic ellipsometry.

O-LED

Encapsulated Organic Light Emitting Diode Devices characterization

Semiconductor

Optical Characterization of Organic Semiconductors

Display

TFT-LCD Display Characterization

Technical Specifications of UVISEL Plus

Category	Feature	Specification
General	Spectral Range	190 – 885 nm (standard), NIR extension up to 2100 nm
	Detection	High-resolution monochromator with sensitive detectors
Manual Configuration	Spot Size	0.05 mm, 0.1 mm, 1 mm (via pinhole)
	Sample Stage	150 mm platform; manual height (20 mm) and tilt adjustment
	Goniometer	Manually adjustable angle from 55° to 90° in 5° steps
Automatic Config.	XY Sample Stage	200 × 200 mm or 300 × 300 mm
	Height & Tilt Adjustment	Manual height (4 mm); tilt adjustment
	XYZ + Theta Stage	XYZ stage with automatic theta control
	Automatic Goniometer	45° to 90°, adjustable in 0.01° steps
Integrated Goniometer	Angle of Incidence	35° to 90°, manually adjustable in 5° steps
	Sample Holder	150 mm platform; 20 mm manual Z-height adjustment
	Sample Alignment	Optional autocollimation system
	Dimensions	Width: 25 cm; Height: 35 cm; Depth: 21 cm
In-Situ Configuration	Mechanical Adaptation	CF35 or KF40 flanges
	Configuration Switching	Easy switch between in-situ and ex-situ setups
Options	Accessories	Temperature-controlled cell, liquid cell, electrochemical cell, reflectometry module
	Vision System	CCD camera
Performance	Accuracy	Ψ = 45° ± 0.01° and Δ = 0° ± 0.01° (in straight-through air config, 1.5–5.3 eV)
	Repeatability	NIST 1000Å SiO₂/Si: Thickness ±0.1%; n(632.8nm) ±0.0001 (190–2100 nm)