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Semiconductor

Semiconductors and Materials do not exist as distinct markets, but are interconnected, forming a value chain similar to that of textiles. The beginning of this process is Wafer. Each process, like Deposition, Lithography, Etching, and CMP, has a very large value chain. Moreover, the process is supported by huge facilities. This interconnected system is the fabric of the value chain, or “Woven Value." HORIBA's competencies in Control, Measurement and Analysis are enabling researchers, developers, original equipment manufacturers, and end users to deliver novels solutions for the entire of this value chains.

MFC - S600 Series

MFC - S600 Series

Digital Mass Flow Controller

IR-300

IR-300

Vapor Concentration Monitor

IR-400

IR-400

Gas Monitor for Chamber Cleaning

LEM Series

LEM Series

Camera Endpoint Monitor

SEC-N100 Series

SEC-N100 Series

Digital Mass Flow Controller

SEC-Z700X Series

SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

SEC-E series

SEC-E series

Mass Flow Controller

SEC-Z500X Series

SEC-Z500X Series

Digital Mass Flow Controller

SEC-8000 F/D/E Series

SEC-8000 F/D/E Series

High-Temperature Digital Mass Flow Controller

D700uF

D700uF

Micro Flow Pressure-Insensitive Mass Flow Module

EV 2.0 Series

EV 2.0 Series

Endpoint & Chamber Health Monitor

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